Synthesis of arrays nanostructured porous silicon wires in electron conductivity type silicon with crystallographic orientation (111)
نویسندگان
چکیده
The method of modified metal-assisted electrochemical etching was proposed and arrays nanostructured porous silicon wires on n-type monocrystalline substrate with crystallographic orientation (111) were obtained. influence the electrolyte composition at second stage obtaining morphology by scanning electron microscopy methods revealed. phase controlled Raman spectroscopy. Keywords: Porous silicon,porous Silicon nanowires, MACE, Nanomaterials,
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ژورنال
عنوان ژورنال: ?????? ??????????? ??????
سال: 2023
ISSN: ['0044-4642', '1726-748X']
DOI: https://doi.org/10.21883/tp.2023.02.55481.109-22